Laser Systems Engineering

This book is focused on the advanced diode laser, fiber laser, and their applications in laser ablation, laser-introduced fluorescence, and laser treatment. The advantages of laser technology are shown comprehensively.

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength.