Mems Handbook

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

Since 2004 and with the 2nd edition in 2006, the Springer Handbook of Nanotechnology has established itself as the definitive reference in the nanoscience and nanotechnology area. It integrates the knowledge from nanofabrication, nanodevices, nanomechanics, Nanotribology, materials science, and reliability engineering in just one volume. Beside the presentation of nanostructures, micro/nanofabrication, and micro/nanodevices, special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects.

Since 2004 and with the 2nd edition in 2006, the Springer Handbook of Nanotechnology has established itself as the definitive reference in the nanoscience and nanotechnology area. It integrates the knowledge from nanofabrication, nanodevices, nanomechanics, Nanotribology, materials science, and reliability engineering in just one volume. Beside the presentation of nanostructures, micro/nanofabrication, and micro/nanodevices, special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects.

Since 2004 the Springer Handbook of Nanotechnology has established itself as the definitive reference in the Nanoscience field. It integrates the knowledge from nanofabrication, nanomechanics, materials science, and reliability engineering in just one volume. Reflecting further developments, the new edition has grown from six to eight parts and from 38 to 58 chapters. Existing chapters have been thoroughly updated and new material has been added to cover developing fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book addresses mechanical and electrical engineers, materials scientists, physicists and chemists who work either in the nano area or in a field that is or will be influenced by this new key technology.

Since 2004 the Springer Handbook of Nanotechnology has established itself as the definitive reference in the Nanoscience field. It integrates the knowledge from nanofabrication, nanomechanics, materials science, and reliability engineering in just one volume. Reflecting further developments, the new edition has grown from six to eight parts and from 38 to 58 chapters. Existing chapters have been thoroughly updated and new material has been added to cover developing fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book addresses mechanical and electrical engineers, materials scientists, physicists and chemists who work either in the nano area or in a field that is or will be influenced by this new key technology.