From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications, 3 edition by Marc J. Madou English | 2011 | ISBN: 142005516X | 650 pages | PDF | 22 MB
Marc J. Madou, "Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set Ed 3" English | ISBN: 0849331803 | 2011 | 1992 pages | PDF | 67 MB