RF MEMS Switches and Integrated Switching Circuits: Design, Fabrication, and Test by Ai-Qun Liu English | PDF,EPUB | 2010 | 276 Pages | ISBN : 0387462619 | 17.5 MB
Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics.