Atomic Layer Deposition: Principles, Characteristics, And Nanotechnology Applicatons

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons by Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen and Arthur Sherman
English | 2013 | ISBN: 1118062779 | 272 pages | PDF | 3,3 MB