Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, "Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications"
English | 2006 | ISBN: 3527312463 | 529 pages | PDF | 5,9 MB
Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control