Piezoresistor Design and Applications by Joseph C. DollEnglish | PDF | 2013 | 252 Pages | ISBN : 1461485169 | 7 MB
This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators.