Electromechanical

MEMS, microfabrication, Silicon technology, micro-sensors, micro-actuators, micromachining

The book presents a broad-scope analysis of piezoelectric electromechanical transducers and the related aspects of practical transducer design for underwater applications. It uses an energy method for analyzing transducer problems that provides the physical insight important for the understanding of electromechanical devices. Application of the method is first illustrated with transducer examples that can be modeled as systems with a single degree of freedom, (such as spheres, short cylinders, bars and flexural disks and plates made of piezoelectric ceramics). Thereupon, transducers are modeled as devices with multiple degrees of freedom.