"Ion Beams in Materials Processing and Analysis" by Bernd Schmidt, Klaus Wetzig
Spr | 2013 | ISBN: 321199355X 3211993568 9783211993569 9783211993552 9783211993576 | 425 pages | PDF | 13 MB
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated.