Handbook of Silicon Semiconductor Metrology by Alain C. Diebold
CRC Press; 1 edition | June 29, 2001 | English | ISBN: 0824705068 | 866 pages | PDF | 12 MB
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and…